热门关键词: PECVD TUBE FURNACE 抗热震性试验机 岩棉荷软测试仪 常温耐磨试验机 耐火制品高温耐磨性测定机 耐火制品相对耐磨性的测定试验机
  
 
PECVD stands for Plasma Enhanced Chemical Vapor Deposition. This PECVD Tube Furnace comes with 1200°C maximum temperature and up to 1100°C continuous working temperature. Overall PECVD tube furnace assembly consists of a Quartz tube furnace, RF plasma source, 4 channels gas mixing tank and high capacity vacuum pump. PECVD tube furnaces are used for fabrication of thin films and coatings for numerous applications ranging from optics and optoelectronics to aerospace, automotive, biomedical, microelectronics, and others. We manufacture these furnaces with reliable branded parts and supply all India and export at competitive price.
| Maximum temperature | 1200°C | 
| Continuous working temperature | 1100°C | 
| Heating tube | Quartz | 
| Available tube heating zone length | 200 / 350 / 440 mm | 
| Available tube OD | 40 / 60 / 100 mm | 
| Heating element | Resistance wire heating element | 
| Temperature controller | Programmable PID temperature controller Single program & 30 segments Auto-tuning function | 
| Thermocouple | K Type | 
| Heating zone construction | High alumina ceramic fiber | 
| Power supply | 410V/50Hz | 
| Plasma RF Power Supply | 5-300W adjustable | 
| RF frequency | 13.56 MHz | 
| Reflection power | 200W | 
| Vacuum pump | Heavy duty oil filled vacuum pump | 
| Mass flow meter | 4 channel gas mixing mass flow meter | 


 
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