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洛阳高温炉实力制造商
质量可靠 性价比高
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服务热线
质量可靠 性价比高
服务热线
热门关键词: PECVD TUBE FURNACE 生物质炭化 石英坩埚 高温熔点测定仪的检测项目与优势 炉渣熔化温度特性测试仪 1000℃电加热回转窑
PECVD stands for Plasma Enhanced Chemical Vapor Deposition. This PECVD Tube Furnace comes with 1200°C maximum temperature and up to 1100°C continuous working temperature. Overall PECVD tube furnace assembly consists of a Quartz tube furnace, RF plasma source, 4 channels gas mixing tank and high capacity vacuum pump. PECVD tube furnaces are used for fabrication of thin films and coatings for numerous applications ranging from optics and optoelectronics to aerospace, automotive, biomedical, microelectronics, and others. We manufacture these furnaces with reliable branded parts and supply all India and export at competitive price.
| Maximum temperature | 1200°C |
| Continuous working temperature | 1100°C |
| Heating tube | Quartz |
| Available tube heating zone length | 200 / 350 / 440 mm |
| Available tube OD | 40 / 60 / 100 mm |
| Heating element | Resistance wire heating element |
| Temperature controller |
Programmable PID temperature controller Single program & 30 segments Auto-tuning function |
| Thermocouple | K Type |
| Heating zone construction | High alumina ceramic fiber |
| Power supply | 410V/50Hz |
| Plasma RF Power Supply | 5-300W adjustable |
| RF frequency | 13.56 MHz |
| Reflection power | 200W |
| Vacuum pump | Heavy duty oil filled vacuum pump |
| Mass flow meter | 4 channel gas mixing mass flow meter |
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